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Advanced: Theory and Maintenance


Who should attend?

This course is designed for those individuals in the semiconductor industry who will support the Applied Materials VeritySEM II

Course Objective and Summary

* Identify all safety hazards associated with the CD-SEM tools.
* Describe the functional description and theory of operation of the CD-SEM tools.
* Operate the VeritySEM II control system including basic UNIX functions
* Perform scheduled routine maintenance procedures for the CD-SEM and VeritySEM II.


Course Benefits

Increase functional knowledge of 150mm/200mm/300mm CD-SEM tools, system components, and subcomponents * 

* Standardized maintenance practices according to Applied Materials procedures to reduce system downtime and increase repeatable results.

* Reduce system faults by increasing adherence to the routine maintenance schedule

Course Information

Prerequisites: None

Course location: Classroom and Cleanroom in the GTi Applications Lab
Course Length: 5 working days

Maximum Number of attendees: 4