Critical Dimension

Basic Applications

Curriculum

Who should attend?

This course is designed for anyone who will be working with 200mm/300mm VeritySem II tool family CD-SEM systems including hardware engineers and application engineers.

Course Information

Prerequisites: None

Course location: Classroom and Cleanroom in the GTi Application Lab
Course Length: 5 working days

Maximum Number of attendees: 4

Information

Course Benefits

Increase knowledge of system components and their interrelationships – Improve Automatic CD recipes

Course Objective and Summary

* Locate and describe all safety hazards associated with the basic operations of the CD-SEM tools

* Locate and describe the main components and capabilities of the CD-SEM tools

* Perform a CD Measurement job

* Program a recipe for 5-site automatic CD

* Optimize a recipe

* Apply Best Known Methods (BKM’s)

* Review the results