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defect review

Basic Applications


Who should attend?

This course is designed for those individuals in the semiconductor industry who require the knowledge and skills to perform routine maintenance on DR-SEM 200mm/300mm Applied Materials SemVision DR-200 DR-300 G2 G3 G4 G5 and GX

Course Objective and Summary

Identify Locate and describe all safety hazards associated with the basic operations of the SEM Vision 200mm/300mm

Describe Locate and describe the main components and capabilities of the SEM Vision 200mm/300mm.

Perform a review job

Program a recipe for an automatic review (D2D, 020) Optimize a recipe
Apply Best Known Methods (BKMs)
Review the results


Course Benefits

* Increase functional knowledge of DR-SEM 200/300mm system components and subcomponents

* Increase Improve automatic defect review success rates by optimized program- ming of patterned wafer recipes

Course Information

Prerequisites: None

Course location: Classroom and Cleanroom in the GTi Application Lab
Course Length: 5 working days

Maximum Number of attendees: 4